DetailµFOCUS 450
The small spot monochromator µFOCUS 450 is developed for XPS measurements in UHV regime as well as in near ambient pressure ranges.
The µFOCUS 450 monochromator is equipped with microfocus high performance X-ray source XR MC which is specially designed for the use with the monochromator. This small spot source is equipped with Al anode in the standard configuration and two upgradable higher energies anodes (Ag, and Cr) for HAXPES capabilities. The µFOCUS 450 monochromator together with the XR MC microfocus X-ray source is perfectly suited for small spot, high resolution and high intensity XPS measurements. The X-ray monochromator operates according to Bragg´s Law of X-ray diffraction. Each wavelength of X-rays (Al Kα, Ag Lα, Cr Kα) is reflected from individually optimized crystals at a specific angle of reflection. For the Al anode, a quartz crystal is used, which has a 450 mm Rowland circle diameter, whereas for Ag and Cr two different oriented germanium crystals are used, which have 416 and 676 mm Rowland circles respectively. Due to its overall compactness, the µFOCUS 450 is suitable for mounting on almost any analysis chambers as a bolt-on component. Furthermore, being already equipped with a Si3N4 window, by using the differentially pumped NAP extension, the µFOCUS 450 allows to carry out XPS measurements under gas atmospheres of up to 50 mbar.
KEY FEATURES
- Spot size on the sample: between <100 µm and >1 mm
- Monochromatic variable X-rays energies (Al Kα, Ag Lα, Cr Kα excitations) with high energy resolution for most demanding XPS measurements
- Higher energies anodes upgradable at anytime
- High photon flux up 1.9x1010 photons/s (Al Kα)
- Rowland circle with 450 mm (Al)
- Pumping port for differential pumping
- Option to operate the system in UHV or NAP environment
- Fully motorized and software controlled
SPECIFICATIONS
| Maximum Anode Voltage | 15 kV |
| Working Conditions | UHV |
| Required Accessories | CCX 70 Isolation Unit Closed-Cycle Water Cooling System |
| Monochromated | Yes |
| Anode Materials Available | Al anode (1486.7 eV) |
| Power Supply | UXC 1000 Universal X-Ray Source Control |
| Mounting Flange | DN100 CF |
| Insertion Depth | n.a. max. chamber port length for µFOCUS 500: 177 mm max. chamber port length for µFOCUS 600: 254 mm |
| Rowland Cirlce Diameter | 500 mm for µFOCUS 500 |
| Spot Size | < 200 µm to > 1 mm |
| Photon Flux | up to 2x1010 photons/s for Al |
