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EnviroMETROS LAB

EnviroMETROS LAB is a fully automated XPS system designed to make high-quality surface analysis easier, faster, and more accessible. Combining reliable X-ray photoelectron spectroscopy with automated sample handling, measurement workflows, and data acquisition, it enables efficient routine XPS measurements with consistent results. From research laboratories to centralized analytical facilities, this new XPS/HAXPES instrument with unique features provides a powerful solution for automated surface characterization and elemental analysis.

EnviroMETROS LAB is the new generation of automated advanced surface and interface analysis system. Designed for complex research samples, it combines XPS, HAXPES and PARXPS with complementary methods and unique ability to control the condition from UHV to 50 mbar.

Model Comparison

The EnviroMETROS LAB is equipped with a monochromatic four energy line X-ray source enabling fast acquisition of high-quality spectra from welldefined analysis areas. The LAB configuration is also compatible with Near-Ambient Pressure (NAP) measurements. This enables operando studies observing surface chemistry as it happens.

X-ray source

  • Up to 4 switchable X-ray excitation lines (Al Kα, Ag Lα, Ti Kα, Cr Kα)
  • Spot sizes: Al Kα and Ag Lα: < 100 μm to 500 μm; 
    Ti Kα: < 150 μm to 500 μm; 
    Cr Kα: < 200 μm to 500 μm

Pressure

  • UHV (< 5 × 10-10 mbar)
  • Upgradable to NAP conditions (up to 50 mbar)

The EnviroMETROS μLAB is equipped with a monochromatic multi-color X-ray source with a scannable small spot size. This level of spatial resolution enables chemical-state mapping and small-area analysis on heterogeneous samples, microstructured devices, and individual features that would be averaged out by a larger beam.
 

X-ray source

  • Up to 3 switchable X-ray excitation lines (Al Kα, Ag Lα or Ti Kα, Cr Kα)
  • Spot sizes: Al Kα and Ag Lα: < 10 μm to 300 μm; 
    Ti Kα and Cr Kα: < 25 μm to 300 μm
  • Scannable: 2 × 2 mm

Pressure

  • UHV (< 5 × 10-10 mbar)

KEY FEATURES

• Non-destructive depth profiling via PARXPS and HAXPES
• Four X-ray lines Al, Ag, Ti and Cr
• X-ray spot size < 10 µm
• Near-ambient pressure optional
• Additional techniques: UPS, IPES, REELS, SEM / SAM, RAMAN / IRRAS

MADE FOR THESE METHODS

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XPS – X-ray Photoelectron Spectroscopy and Chemical Mapping
X-ray photoelectron spectroscopy (XPS) is a widely used method for chemical analysis. By surface imaging or mapping a chemical map can be recorded
HAXPES
Hard X-ray Photoelectron Spectroscopy can provide information about chemical composition in the bulk of a material, rather than in the surface.
IPES, BIS
Inverse Photoelectron Spectroscopy or Bremsstrahlung Isochromate Spectroscopy is a laboratory-based method to analyze unoccupied states
(R)EELS
In Reflection Electron Energy Loss Scattering (REELS) the inelastically scattered electrons from a surface are detected for their loss energies
AES, SAM, SEM
Auger-Meitner electron spectroscopy/microscopy detects the energy distribution of secondary electrons returning from a surface for chemical analysis.
(LE)ISS
Low Energy Ion Scattering Spectroscopy (LEISS) is the most surface sensitive method for chemical analysis. Only the topmost layer is probed.
IRRAS and Raman
Charge Compensation
Methods to compensate positive or negative charging of insulating sample surfaces during characterization with charged particles, like XPS and SEM.
NAP-XPS and NAP-UPS
X-ray Photoelectron Spectroscopy (XPS) and Ultraviolet Photoelectron Spectroscopy (UPS) are well-established and versatile techniques commonly used...
ARXPS, Depth Profiling, XPD
Angle resolved XPS allows for angle dependent measurements, revealing depth distributions of elements and local structure by photoelectron diffraction
Sputter Depth Profiling
Film Thicknesses of multilayer samples and the depth distribution of elements can be characterized by sputter depth profiling.

SPECIFICATIONS

EnviroMETROS LAB
Configuration
Electron spectrometer
  • High-transmission electron analyzer with 60° wide angle lens
  • AD-CMOS detector with > 1200 energy channels and > 12 angle channels
X-ray source
  • Small spot monochromated
  • Spot sizes: < 10 µm or < 100 µm, depending on the selected X-ray source
  • Switchable energy lines (Al Kα, Ag Lα,Ti Kα,Cr Kα)
Sample holder size
  • 80 mm × 80 mm
Sample Holder
  • Up to 4 electrical contacts on sample holder
    (more optional on request)
System
  • Integrated load lock, sample distribution and sample storage chamber with automated sample transfer
  • Connection from distribution chamber to other UHV or HV systems or sample introduction from a glovebox (optional)
Sample stage
  • Fully motorized, three axis sample stage for full 80 mm × 80 mm lateral motion and 20 mm vertical motion

APPLICATION NOTES

Non-destructive depth profiles by Parallel Angle-Resolved XPS (PARXPS)
Non-destructive depth profiles by Parallel Angle-Resolved XPS (PARXPS)
Parallel angle-resolved XPS is a powerful tool for obtaining non-destructive surface depth profiles of layered thin-film samples.
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Non-destructive depth profiling by Variable Energy PARXPS (VE-PARXPS)
Non-destructive depth profiling by Variable Energy PARXPS (VE-PARXPS)
Parallel angle-resolved X-ray photoelectron spectroscopy (PARXPS) is a powerful tool for obtaining non-destructive depth profiles of layered thin-film samples. In this study, PARXPS was used…
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DOWNLOADS

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EnviroMETROS LAB
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