Monochromatic X-ray source with highest X-ray flux density for micro-probe ESCA
The new μ-FOCUS 195 small spot X-ray monochromator is a bolt-on component with spot sizes ranging between 150 μm to 10 μm, that can be operated in UHV, as well as under Near Ambient Pressure (NAP) conditions up to 100 mbar or higher. The variable spot size is acheived by focussing and defocussing the electron source. The setup of anode, crystal and sample is following the classical Rowland geometry with a small Rowland circle diameter of 195 mm for small spot size staility and flux optimization. This geometry allows for a narrow spectral width of < 250 meV.
The complete μ-FOCUS 195 with all its parts is mounted one DN 275 CF flange that allows for a precise pre-adjustment of the monochromator with minimal degrees of freedom for later adjustment.This ensures a maximum uptime of the source and reliable day-to-day performance.
Using the special analysis chamber, the μ-FOCUS 195 can be combined with every PHOIBOS analyzer, model for UHV or NAP-XPS. The optimized chamber geometry also allows for mounting additional Ion, Electron,UV and X-ray sources, as well as UHV or NAP sample manipulators.
- Spot size on the sample: between 10 µm and 150 µm
- High Photon Flux density up to 3.3 · 1010 photons/s
- Monochromatic Al Kα excitation with high energy resolution
- Near Ambient Pressure compatibility: operation range from UHV to >100 mbar
- Rowland circle with 195 mm diameter
- Compact bolt-on component design on DN275CF mounting flange
|Maximum Anode Voltage|
UHV to >100 mbar
|Anode Materials Available|
Al (Al Kα radiation)
DN 275 CF
|Rowland Cirlce Diameter|
10 - 150 µm
In Small Spot Mode (10 µm spot size): 1.4 x 109 photons/s
In High Flux Mode (150 µm): 3.3 x 1010 photons/s
Exchange anode for XR-MF 125 source for SPECS µ-Focus 350 source
Replacment excenter driver for SPECS µ-Focus 350 source
Replacmeent inner O-Ring for SPECS µ-Focus 350 main housing flange
Replacmeent outer O-Ring for SPECS µ-Focus 350 main housing flange