Detailµ-FOCUS 350
µ- FOCUS 350 High Performance Small Spot X-Ray Monochromator
The µ- FOCUS 350 X-ray monochromator for UHV enables high resolution XPS measurements with extremely small spot size in the laboratory off the synchrotron. The high performance monochromator is available with Rowland circle diameter of 350 mm. As well due to its overall compactness it also matches customer chambers as a bolt-on component. Al anode X-ray source is used in combination with this monochromator. The achieveble spot size 50 μm, which is unique only to SPECS small spot monochromators.
SPECIFICATIONS
| Power | Al 125 W |
| Maximum Anode Voltage | 15 kV |
| Dual Anode | No |
| Working Conditions | UHV |
| Required Accessories | CCX 125 MF Isolation Unit Differential Pumping Package Closed-Cycle Water Cooling System |
| Optional Accessories | n.a. |
| Monochromated | Yes |
| Anode Materials Available | Al |
| Power Supply | XRC 125 MF |
| Mounting Flange | requires special chamber geometry |
| Insertion Depth | n.a. |
| Rowland Cirlce Diameter | 350 mm |
| Cross Talk | n.a. |
| Spot Size | < 50 µm |
SPARE PARTS
Exchange anode for XR-MF 125 source for SPECS µ-Focus 350 source
Replacment excenter driver for SPECS µ-Focus 350 source
Replacmeent inner O-Ring for SPECS µ-Focus 350 main housing flange
Replacmeent outer O-Ring for SPECS µ-Focus 350 main housing flange
