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µ-FOCUS 350

µ- FOCUS 350 High Performance Ultra Small-Spot X-Ray Monochromator

The µ- FOCUS 350 X-ray monochromator for UHV enables high resolution XPS measurements with extremely small spot size in the laboratory off the synchrotron. The high performance monochromator is available with Rowland circle diameter of 350 mm. As well due to its overall compactness it also matches customer chambers as a bolt-on component. Al anode X-ray source is used in combination with this monochromator. The achieveble spot size 50 μm, which is unique only to SPECS small spot monochromators.

KEY FEATURES

  • Mounting flange DN100CF
  • Al excitation line
  • Rowland Circle 350 mm diameter
  • Guaranteed spot size on the sample of 50 µm
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MADE FOR THESE METHODS

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SPARE PARTS

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Product description
Article No.
 
AL-Anode for XR-MF 125

Exchange anode for XR-MF 125 source for SPECS µ-Focus 350 source

2060016769
Exzenter drive for XR-MF125

Replacment excenter driver for SPECS µ-Focus 350 source

2060013268
O-Ring 435 x 6 Vi 500 for XR_MF 125

Replacmeent inner O-Ring for SPECS µ-Focus 350 main housing flange

2060013990
O-Ring 480 x 6 Vi 500 for XR-MF 125

Replacmeent outer O-Ring for SPECS µ-Focus 350 main housing flange

2060013989
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