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µ-FOCUS 350

µ- FOCUS 350 High Performance Small Spot X-Ray Monochromator

The µ- FOCUS 350 X-ray monochromator for UHV enables high resolution XPS measurements with extremely small spot size in the laboratory off the synchrotron. The high performance monochromator is available with Rowland circle diameter of 350 mm. As well due to its overall compactness it also matches customer chambers as a bolt-on component. Al anode X-ray source is used in combination with this monochromator. The achieveble spot size 50 μm, which is unique only to SPECS small spot monochromators.

KEY FEATURES

  • Al excitation line
  • Rowland Circle 350 mm diameter
  • Guaranteed spot size on the sample: < 50 µm

MADE FOR THESE METHODS

2

SPECIFICATIONS

µ-FOCUS 350
Operation
Power

Al 125 W

Maximum Anode Voltage

15 kV

Dual Anode

No

Working Conditions

UHV

Required Accessories

CCX 125 MF Isolation Unit

Differential Pumping Package

Closed-Cycle Water Cooling System

Optional Accessories

n.a.

Monochromated

Yes

Mounting
Anode Materials Available

Al

Power Supply

XRC 125 MF

Mounting Flange

requires special chamber geometry

Insertion Depth

n.a.

Rowland Cirlce Diameter

350 mm

Performance
Cross Talk

n.a.

Spot Size

< 50 µm

RELATED PRODUCTS

11

SPARE PARTS

4
Product image
Product description
Article No.
 
AL-Anode for XR-MF 125

Exchange anode for XR-MF 125 source for SPECS µ-Focus 350 source

2060016769
Exzenter drive for XR-MF125

Replacment excenter driver for SPECS µ-Focus 350 source

2060013268
O-Ring 435 x 6 Vi 500 for XR_MF 125

Replacmeent inner O-Ring for SPECS µ-Focus 350 main housing flange

2060013990
O-Ring 480 x 6 Vi 500 for XR-MF 125

Replacmeent outer O-Ring for SPECS µ-Focus 350 main housing flange

2060013989

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