System Solutions, Made by SPECS

Standard series or tailored system—always built for your science

Explore the entire range of SPECS system solutions, from our robust and feature-rich standard systems (ProvenX) through building-block type system modules (FlexMod) to customized one-of-a-kind, multi-method systems (eg NAP-XPS Systems). We scale our technology to perfectly match your scientific ambition.

The heart of almost every SPECS system

Electron Analyzers are the indispensable core of any SPECS system, precisely measuring the energy and angle of electrons. A comprehensive choice of specialized analyzers ensures the optimal setup for any experiment. This selection ranges from the versatile PHOIBOS/AEOLOS hemispherical analyzers for multi-method analysis to the high-resolution ASTRAIOS for demanding ARPES studies. Furthermore, the specialized Focus NanoESCA and ToF MARIS are available for SPECS systems when special imaging and spectroscopy capabilities are needed. This diverse portfolio guarantees every researcher has access to the most advanced tools essential to obtaining state-of-the-art results in surface science.

Powerful software for seamless data acquisition & control

SpecsLab Prodigy is the integrated software that provides seamless, automated control over the complex SPECS scientific instruments, including electron analyzers and UHV components critical for techniques like XPS and ARPES. Its core benefit is enabling users to efficiently program and run multi-dimensional experiments, from sample handling to data acquisition, all within one intuitive interface. This unified platform ensures high-precision results that can be reliably reproduced, which significantly boosts the productivity.

One-stop source solutions for excitation & preparation

Cutting-edge systems need a comprehensive suite of excitation and preparation sources. These include UV lamps and monochromated X-ray sources for advanced spectroscopy (UPS/ARPES, XPS/HAXPES). Ion sources are available for cleaning, etching, and depth profiling and electron sources for techniques like AES/LEED and charge neutralization. Each source package includes a high-performance controller and modular software designed for seamless integration and efficient data acquisition.

Turn-key vacuum management—streamlining the daily work

All SPECS systems are equipped with Vacuum Control System. This smart solution creates a powerful synergy of reliable hardware and intelligent software. The vacuum status and activities of your UHV system are easily manageable using Vacuum Control´s advanced functions, from initial pump-down to precise operational settings—especially benifitial in complex near ambient pressure (NAP) UHV systems with their increased number of pumps, valves, and gauges.

Optimized manipulators for precise thermal & motion control 

All sample manipulators offered by SPECS, such as the FlexMan or 5-axis Ganymed, provide precise XYZ translation and rotation to perfectly align samples for analysis, crucial for both ARPES and XPS. The accompanying sample stages facilitate robust thermal control, featuring cryogenic cooling (down to below 8 K) and various heating options up to 1100 K. This comprehensive environmental control system allows for essential in-situ sample preparation (like flash heating) and the study of temperature-dependent material properties, directly maximizing the analytical versatility and data quality.

Baking the system made easier thanks to experience

Achieving and maintaining the Ultra-High Vacuum (UHV) requires a multi-day system bake-out process to thermally desorb contaminants. SPECS has continuously improved this process over four decades, developing superior, optimized heating tents and control systems for quick, stable, highly reproducible vacuum performance.