DetailIQE 12/38
The ion source IQE 12/38 is an extractor type, differentially pumped ion source producing a focused, scannable ion beam of high current density.
The IQE 12/38 ion source operates with a filament and ionizes the gas by electron bombardment. Its long-life time special Yttrium oxide coated Iridium filament makes the source suitable for reactive and inert gases. In sensitive environments, differential pumping ensures low pressure during operation of the source.
The two-lens system of the source allows easy changing of the spot size, continuously variable from 125 µm to 1000 µm. The COSCON SIS power supply for the focussing and scanning of the IQE 12/38, is designed for automated operation and full integration into SpecsLab Prodigy software.
SPECIFICATIONS
| Ion Current | >0.8 μA (Argon) at 125 μm spot |
| Ion Energy | 200 eV - 5 keV |
| Operating Gases | Various |
| Scannable | yes |
| Working Principle | Extractor type |
| Applications |
|
| Required Accessories | Gas inlet |
| Optional Accessories | Wien mass filter Remote controlled gas inlet system Differential pumping system Remote operation for depth profiling |
| Scan Range | 10 x 10 mm2 |
| Spot Size | 125 μm at 23 mm working distance |
| Insertion Depth | 186 mm |
| Mounting Flange | DN38CF (2.75 ") |
| Power Supply | COSCON SIS |
SPARE PARTS
Anode cage for IQE 12/38, IQE 11/35, IQE 10/35
Cathode for IQE 12/38, IQE 11/35, IQE 10/35
Replacement ceramic set for IQE12/38
Replacement Tantalum aperture for IQE12/38
Replacement membrane for VAT leak valve
Replacement Piezo actor for SPECS Piezo Gas Inlet system
New VAT leak valve
Bridge cable for PU IQE 12/38, PU IQE 11/35
