DetailIQE 12 LE
Extractor Type Low Energy Ion Source
The IQE 12 LE ion source operates with a filament and ionizes the gas by electron bombardment. It can be switched between normal and low energy mode. In normal mode, the energy range is 0.2 - 5 kV, suitable for depth profiling or LEIS/ISS applications. In low energy mode, one can change the range to 0 - 500 eV. This mode is especially suitable for charge compensation in SEM applications. Its long-lifetime special Yttrium oxide coated Iridium filament makes the source suitable for reactive and inert gases. In sensitive environments, differential pumping ensures low pressure during operation of the source.
The two-lens system of the source allows easy changing of the spot size, continuously variable from 125 µm to 1000 µm. The COSCON LSIS power supply for the focussing and scanning of the IQE 12/38, is designed for automated operation and full integration into SpecsLab Prodigy software.
KEY FEATURES
- Scannable with large scan area
- Special filament for long lifetime and operation with reactive gases
- Differential pumping for low pressure applications
- Power supply with integrated scan and deflection unit
- Keystone correction for depth profiling at tilted angles
- Suitable for dual beam charge compensation in XPS, SEM applications
SPECIFICATIONS
| Ion Current | >0.8 μA (Argon) at 125 μm spot |
| Ion Energy | 10 eV - 5 keV |
| Operating Gases | Various |
| Scannable | yes |
| Working Principle | Extractor type |
| Applications |
|
| Required Accessories | Gas inlet |
| Optional Accessories |
|
| Scan Range | 10 x 10 mm2 at 23 mm working distance |
| Spot Size | 125 μm at 23 mm working distance |
| Insertion Depth | 186 mm |
| Mounting Flange | DN38CF (2.75 ") |
| Power Supply | COSCON LSIS |
SPARE PARTS
Anode cage for IQE 12/38, IQE 11/35, IQE 10/35
Cathode for IQE 12/38, IQE 11/35, IQE 10/35
Replacement ceramic set for IQE12/38
Replacement Tantalum aperture for IQE12/38
