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IQE 12 LE

Extractor Type Low Energy Ion Source

The IQE 12 LE operates with a filament and ionizes the gas by electron bombardment and can be switched between normal mode and low energy mode. In normal mode, the energy range is 0.2 - 5 kV, suitable for depth profiling or LEIS/ISS applications. In low energy mode, one can change the range to 0 - 500 eV. This mode is especially suitable for charge compensation in SEM applications. Its long-lifetime special Yttrium oxide coated Iridium filament makes the source suitable for reactive and inert gases. In sensitive environments, differential pumping ensures low pressure during operation of the source.
The two lens system of the source allows easy changing of the spot size, which is continuously variable from 160 µm to 1000 µm. The PU-IQE12/38 power supply can be remotely controlled and provides key stone correction of the scan area to generate flat crater bottoms on tilted samples.

KEY FEATURES

  • Scannable with large scan area
  • Special filament for long lifetime and operation with reactive gases
  • Differential pumping for low pressure applications
  • Power supply with integrated scan and deflection unit
  • Keystone correction for depth profiling at tilted angles
  • Suitable for dual beam charge compensation in XPS, SEM applications

MADE FOR THESE METHODS

3

SPECIFICATIONS

IQE 12 LE
Operation
Ion Current

>0.8 μA (Argon) at 125 μm spot

Ion Energy

10 eV - 5 keV

Operating Gases

Various

Scannable

yes

Working Principle

Extractor type

Applications

  • Depth profiling
  • Sample cleaning
  • Implantation
  • ISS

Required Accessories

Gas inlet

Optional Accessories

  • Wien mass filter
  • Piezo gas inlet system
  • Differential pumping system
  • Remote operation for depth profiling

Performance
Scan Range

10 x 10 mm2 at 23 mm working distance

Spot Size

125 μm at 23 mm working distance

Mounting
Insertion Depth

186 mm

Mounting Flange

DN38CF (2.75 ")

Power Supply

  • PU-IQE12/38
  • PU-IQE 12/38 LE

DOWNLOADS

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