Differential Pumping Package for µSIRIUS
Pumping System for the µSIRIUS UV Light Source
Efficient pumping system for the SIRIUS for operation in low 10-8 mbar region. Consisting of turbomolecular pumps and connections to rough vacuums system.
- Efficient Pumping System
- Turbo Molecular Pump
- Rough Vacuum Pump Sytem
- Including all Necessary Vacuum Parts
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