EnviroESCA

EnviroESCA is a unique fully automated high throughput system for surface chemical analysis of solids, liquids and their interfaces with gases.

EnviroMETROS LAB

EnviroMETROS LAB is a novel platform for hybrid surface metrology. The Lab version is compatible with all kinds of samples and sizes up 80 x 80 mm.

EnviroMETROS FAB

EnviroMETROS FAB is a novel platform for hybrid surface metrology. The Fab version allows the use of wafers (up to 8″/12″) with full integration to distribution systems and wafer handler.

Extension & Integration

From simple expansion with a wafer handler to extremely complex integration into a cluster tool — we will find your customized solution.

Evolve revolutionary products for new applications and unique experiments.

Enviro analytical instruments introduce a new innovative era of surface analysis, opening up new possibilities for analytical applications in the fields of medical technology, biotechnology, and the life sciences. Building on the pioneering developments of the SPECSGROUP in recent years Enviro proudly presents EnviroESCA and EnviroMETROS.
This series overcomes the barriers of standard XPS systems by enabling analysis at pressures far above UHV.

EnviroESCA – A system designed for high-throughput analysis

The success of XPS or ESCA is a result of its ability for non-destructive and precise quantification of chemical compositions in the uppermost surface. Now available under environmental conditions.

EnviroMETROS - the future of surface hybrid metrology

The novel metrology platform with ultimate stability, reliability and repeatability for large samples and wafers. Available for UHV and NAP conditions.

ENVIRO PRODUCTS

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