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EnviroMETROS LAB

EnviroMETROS LAB provides an integrated approach to advanced surface and interface analysis, enabling correlated insights from the same research sample in one controlled workflow.

EnviroMETROS LAB is the new generation of automated advanced surface and interface analysis system. Designed for complex research samples, it combines XPS, HAXPES and PARXPS with complementary methods and unique ability to control the condition from UHV to 50 mbar.

Model Comparison

The EnviroMETROS LAB is equipped with a monochromatic four energy line X-ray source enabling fast acquisition of high-quality spectra from welldefined analysis areas. The LAB configuration is also compatible with Near-Ambient Pressure (NAP) measurements. This enables operando studies observing surface chemistry as it happens.

X-ray source

  • Up to 4 switchable X-ray excitation lines (Al Kα, Ag Lα, Ti Kα, Cr Kα)
  • Spot sizes: Al Kα and Ag Lα: < 100 μm to 500 μm; 
    Ti Kα: < 150 μm to 500 μm; 
    Cr Kα: < 200 μm to 500 μm

Pressure

  • UHV (< 5 × 10-10 mbar)
  • Upgradable to NAP conditions (up to 50 mbar)

The EnviroMETROS μLAB is equipped with a monochromatic multi-color X-ray source with a scannable small spot size. This level of spatial resolution enables chemical-state mapping and small-area analysis on heterogeneous samples, microstructured devices, and individual features that would be averaged out by a larger beam.
 

X-ray source

  • Up to 3 switchable X-ray excitation lines (Al Kα, Ag Lα or Ti Kα, Cr Kα)
  • Spot sizes: Al Kα and Ag Lα: < 10 μm to 300 μm; 
    Ti Kα and Cr Kα: < 25 μm to 300 μm
  • Scannable: 2 × 2 mm

Pressure

  • UHV (< 5 × 10-10 mbar)

KEY FEATURES

• Non-destructive depth profiling via PARXPS and HAXPES
• Four X-ray lines Al, Ag, Ti and Cr
• X-ray spot size < 10 µm
• Near-ambient pressure optional
• Additional techniques: UPS, IPES, REELS, SEM / SAM, RAMAN / IRRAS

MADE FOR THESE METHODS

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SPECIFICATIONS

EnviroMETROS LAB
Configuration
Sample holder size
  • 80 mm × 80 mm
Sample holders
  • Up to 4 electrical contacts on sample holder
    (more optional on request)
Sample stage
  • Fully motorized, non-magnetic, UHV/NAPcompatible and computer controlled three axis sample stage for full
    80 mm × 80 mm lateral motion and 20 mm vertical motion

RELATED PRODUCTS

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APPLICATION NOTES

DOWNLOADS

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