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Working Principle

Radio Frequency assisted plasma source

E-beam power

500 W max. at 13.56 MHz

(400W for oxygen and hydrogen)

Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)

Opteration Modes

Hybrid mode

Operating Pressure

< 10-7 - 10-5 mbar

Optional Accessories

Integrated shutter

Non standard lengths

Various aperture types

Differential pumping

Autotuning unit


Plasma monitor

Plasma Control

Faraday Cup

Insertion Depth

309 mm

Mounting Flange

NW63CF (4.5 ")

Spot Size

23 mm at source

Product details
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