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Working Principle

Microwave assisted plasma source

E-beam power

60 W max. at 2.45 GHz

Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)

Operating Modes

Ion mode

Operating Pressure

< 10-7 - 10-5 mbar

Optional Accessories
  • Integrated shutter
  • Non standard lengths
  • Various aperture types
  • Differential pumping
  • Ion trap: Deflects residual ion current o
  • Faraday cup: Provides the possibility to monitor the beam current
Spot Size

~13 mm at source

Mounting Flange

NW40CF (2.75 ")

Insertion Depth

130 mm

Product details
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