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IQE 12/38
Operation
Ion Current

>0.8 μA (Argon) at 125 μm spot

Ion Energy

200 eV - 5 keV

Operating Gases

Various

Scannable

yes

Working Principle

Extractor type

Applications

  • Depth profiling
  • Sample cleaning
  • Implantation
  • ISS

Required Accessories

Gas inlet

Optional Accessories

Wien mass filter

Remote controlled gas inlet system

Differential pumping system

Remote operation for depth profiling

Performance
Scan Range

10 x 10 mm2

Spot Size

125 μm at 23 mm working distance

Mounting
Insertion Depth

186 mm

Mounting Flange

DN38CF (2.75 ")

Power Supply

PU-IQE12/38

Product details
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