The ion source IQE 12/38 is an extractor type, differentially pumped ion source producing a focused, scannable ion beam of high current density.
The IQE 12/38 operates with a filament and ionizes the gas by electron bombardment. Its long-lifetime special Yttrium oxide coated Iridium filament makes the source suitable for reactive and inert gases. In sensitive environments, differential pumping ensures low pressure during opration of the source.
The two lens system of the source allows easy changing of the spot size, which is continuously variable from 160 µm to 1000 µm. The PU-IQE12/38 power supply can be remotely controlled and provides key stone correction of the scan area to generate flat crater bottoms on tilted samples.
- Scannable with large scan area
- Special filament for long lifetime and operation with reactive gases
- Differential pumping for low pressure applications
- Power supply with integrated scan and deflection unit
- Keystone correction for depth profiling at tilted angles
Anode cage for IQE 12/38, IQE 11/35, IQE 10/35
Cathode for IQE 12/38, IQE 11/35, IQE 10/35
Replacement ceramic set for IQE12/38
Replacement Tantalum aperture for IQE12/38
Replacement membrane for VAT leak valve
Replacement Piezo actor for SPECS Piezo Gas Inlet system
New VAT leak valve
Bridge cable for PU IQE 12/38, PU IQE 11/35