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IQE 12/38

The ion source IQE 12/38 is an extractor type, differentially pumped ion source producing a focused, scannable ion beam of high current density.

The IQE 12/38 operates with a filament and ionizes the gas by electron bombardment. Its long-lifetime special Yttrium oxide coated Iridium filament makes the source suitable for reactive and inert gases. In sensitive environments, differential pumping ensures low pressure during opration of the source.
The two lens system of the source allows easy changing of the spot size, which is continuously variable from 160 µm to 1000 µm. The PU-IQE12/38 power supply can be remotely controlled and provides key stone correction of the scan area to generate flat crater bottoms on tilted samples.

 

KEY FEATURES

  • Scannable with large scan area
  • Special filament for long lifetime and operation with reactive gases
  • Differential pumping for low pressure applications
  • Power supply with integrated scan and deflection unit
  • Keystone correction for depth profiling at tilted angles
     
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MADE FOR THESE METHODS

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SPECIFICATIONS

IQE 12/38
Operation
Ion Current

>0.8 μA (Argon) at 125 μm spot

Ion Energy

200 eV - 5 keV

Operating Gases

Various

Scannable

-

Working Principle

Extractor type

Applications

  • Depth profiling
  • Sample cleaning
  • Implantation
  • ISS

Required Accessories

Gas inlet

Optional Accessories

  • Wien mass filter
  • Piezo gas inlet system
  • Differential pumping system
  • Remote operation for depth profiling

Performance
Scan Range

-

Spot Size

125 μm at 23 mm working distance

Mounting
Insertion Depth

186 mm

Mounting Flange

DN38CF (2.75 ")

Power Supply

PU-IQE12/38

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RELATED PRODUCTS

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APPLICATION NOTES

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SPARE PARTS

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Product image
Product description
Article No.
 
Anode Cage for IQE 12/38, IQE 11/35, IQE 10/35

Anode cage for IQE 12/38, IQE 11/35, IQE 10/35

2055006853
Cathode for IQE 12/38 / IQE 11/35 / IQE 10/35

Cathode for IQE 12/38, IQE 11/35, IQE 10/35

2055014947
Set of ceramics for IQE 12/38

Replacement ceramic set for IQE12/38

2020031951
Tantalum aperture for IQE 12/38

Replacement Tantalum aperture for IQE12/38

2020031537
Membrane for VAT leak valve

Replacement membrane for VAT leak valve

2100010186
piezo actor

Replacement Piezo actor for SPECS Piezo Gas Inlet system

2060005909
variable leak valve DN16CF-R

New VAT leak valve

2060015126
SHV-Jumper Cable

Bridge cable for PU IQE 12/38, PU IQE 11/35

2060009307
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DOWNLOADS

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