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FOCUS EFM 4s

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FOCUS EFM 4s

The EFM 4s

MADE FOR THESE METHODS
SPECIFICATIONS
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MADE FOR THESE METHODS

1

Thin film deposition techniques allow for controlled growths of thin films either from an atomic/molecular flow or from chemically reactive precursors

SPECIFICATIONS

FOCUS EFM 4s

Operation

Number of Pockets	1
Water Cooling	internal
E-beam power	300 W
Operating Pressure	< 10^-10 - 10^-5 mbar
Optional Accessories	Non standard lengths

Mounting

Mounting Flange	NW35CF (2.75 ")
Insertion Depth	210 mm
Max. Rod Feed	25 mm
Power Supply	300 W
Shutter	Motorized shutter

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2

Focus EFM Series

EFM Brochure

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