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Small Spot XPS System

Small Spot XPS System for Extra Small Spot XPS Analysis

Small Spot XPS System is designed to perform XPS analysis  with a small spot  X-Ray source, typically µ-FOCUS 500 or µ-Focus 600 with Rowland circle diameter of 500 or 600 mm and a variable spot size from under 200 µm to several hundred micrometers at power ranges from 10W to 150W. A single aluminum anode is fitted as standard. The advantages on the XPS analysis of this system in comparison with a non-monochromatic XPS System are the following:

  • Higher resolution
  • Higher sensitivity
  • Lower Background
  • No satellites
  • Reduced sample damage
  • µ-focused X-ray spot

It provides the scientist with an optimized solution.  The system allows to start with a basic configuration for Small spot XPS and expand with upgrade options towards improved performance or expand to additional analysis methods. This means the system can grow depending of additional requirements and needs.

The system basis consists basically in the following items:

  • Analysis chamber (stainless steel or µ-metal)
  • PHOIBOS Analyzer (100 or 150) with 1D or 2D detector
  • Manipulator with until 5 axis movement option and heating and cooling option
  • Small spot X-ray source (µ-FOCUS 500 or µ-FOCUS 600)
  • Water Cooling System for Source and pumping system
  • Load lock chamber for sample introduction with sample storage and sample heating options
  • Extension possibility for possible preparation or reaction chamber
  • Pumping system
  • Bake-out system
  • SPECS software for data acquisition, data analysis, remote control and automation possibility

Additional and optional items:

  • Ion gun for sample cleaning (IQE 11/35) (recommended)
  • Ion gun for sample cleaning and sputtering depth profiling (IQE 12/38)
  • Flood Gun (FG 22/35) for sample charge neutralization
  • Combination of Low energetic ion gun and Flood Gun for sample charge neutralization
  • Electron gun for Auger Spectroscopy (EQ 22/35)
  • Ultra Violet Source for UPS measurements (UVS 10/35 or UVS 300)
  • Sample camera
  • Laser pointer


  • Flexible and Modular Surface Analysis System Design
  • Optimized for best analysis performance
  • MultiMethod system capability (it can be combined with UPS, AES, ISS)
  • Easy and cost effective upgrade options


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