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Flexible and Upgradable SEM/SAM+ARXPS System for Better and Deeper  Analysis of Sample Surface Composition

The SEM/SAM+ARXPS System  is designed to perform ARXPS analysis  with a small spot X-Ray source and a wide angle lens analyzer, in combination with Scanning Electron and Auger Microscopy with an electron source and a secondary electron detector as part of the analysis system. With this system, 2 analysis methods are combined to give a complementary, better and deeper understanding regarding sample surface properties.

It provides the scientist with an optimized solution. The system allows to start with a basic configuration for SEM/SAM+ARXPS System and expand with upgrade options towards improved performance or expand to additional analysis methods. This means the system can grow depending of additional requirements and needs.

The possibility of coupling the system to other UHV systems as well as adapting the system for fulfilling customized criteria is also available. The system basis consists basically in the following items:

  • µ-metal analysis chamber
  • PHOIBOS 150 WAL (Wide Angle Lens) with 2 Ddetector
  • Manipulator with until 5 axis movement option and heating and cooling option
  • Small or ultrasmall spot X-ray source
  • Focused electron source
  • Secondary electron detector
  • Water Cooling System for Source and pumping system
  • Load Lock chamber for sample introduction with sample storage and sample heating options
  • Extension possibility for possible preparation or reaction chamber
  • Pumping System
  • Bake-out System
  • Electronic
  • SPECS Software for data acquisition, data analysis, remote control and automation possibility

Additional and optional items

  • Ion gun for sample cleaning (IQE 11/35) (recommended)
  • Ion gun for sample cleaning and sputtering depth profiling (IQE 12/38)
  • Flood Gun (FG 22/35) for sample charge neutralization
  • Combination of Low energetic ion gun and Flood Gun for sample charge neutralization
  • Ultraviolet source for UPS measurements (UVS 10/35 or µSIRIUS)
  • Monochromated small spot UV source for ARPES
  • Sample camera
  • Laser pointer


  • State of the art ARXPS with 60° Acceptance Angle
  • Optimized Lens Geometry for Non-destructive depth profiling
  • Large Kinetic and Pass Energy Range
  • High energy and Angular Resolution
  • X-ray Spectroscopy performance
  • Auger Spectroscopy performance
  • Electron and Auger Microscopy
  • Flexible and Modular Surface Analysis System Design
  • Optimized for best analysis performance
  • MultiMethod system capability (it can be combined with ARPES)
  • Easy and cost effective upgrade options


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