Multimethod System with XPS and INA-X (SIMS/SNMS)
Multimethod System with INA-X (Secondary Neutral Mass Spectrometry) and XPS Chambers for Wide Range of Modern Surface Science Applications
The SPECS Multimethod System with INA-X and XPS is a fully equipped UHV analysis system for modern surface science applications. All systems are designed and manufactured at the SPECS headquarter in Berlin. A special engineering group personally accompanies the system process from the order placing until the final acceptance. Our engineers are dedicated to highest quality and usability of the system during design, testing and setup on site. Once the system is in full operation, a professional service team in our HQ and our worldwide branch offices takes care of a smooth and stable operation.
The system consists of INA-X and XPS chambers connected to each other. The XPS system allows chemical analysis of the samples using photoelectron spectroscopy. INA-X allows secondary neutral mass spectoscopy analysis of the samples for detailed impurity analysis and rapid routine depth profiling applications.
The typical vacuum in SPECS systems is better than 2 x 10-10 mbar achieved during assembly at SPECS. A final end pressure in the 10-11 mbar range is achievable. The standard pumping configuration consists of and ion getter pump (IGP), a titan sublimation pump (TSP) and a turbo molecular pump (TMP) with connecting to a roughing vacuum. Different pumping configurations are available on request including cryopumps, larger pumping schemes and also NEG pumps.
All systems are equipped with a rigid frame and included bake-out tents with automated heating systems. An electronics cabinet hosts all relevant electronics, a main power supply and a TCP/IP based communication platform for the control units.