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Multimethod Surface Analysis System Cluster

Multimethod Surface Analysis Cluster system with SPECS ARPES, SPM and LEEM, combined with IonTof Qtac and SPECS Linear Transfer System

The SPECS system for laboratory ARPES is a fully equipped UHV analysis system for modern surface analysis including ARPES and XPS. All systems are design and manufactured at the SPECS headquarter in Berlin. A special engineering group personally accompanies the system process from the order placing until the final acceptance. Our engineers are dedicated to highest quality and usability of the system during design, testing and setup on site. Once the system is in full operation a professional service team in our HQ and our worldwide branch offices takes care of a smooth and stable operation.

The SPECS linear transfer system connected different satellite modules by a UHV vacuum tube with integrated sample carrier. Up to 5 slots for multiple samples can be moved automatically between the system interconnection points. The flexible design allows a cost efficient upgrade with additional transfer segments. Each segment can host up to two full scale satellite system modules.

The present multimethod system combines SPECS ARPES, SPM and LEEM imtruments with thrid party analysis tools such as Qtac (LEIS) from IonTof.


  • PHOIBOS ARPES Analyzer
  • Energy Resolution <1.8 meV
  • Angular Resolution <0.1Ā°
  • Monochromated Small Spot UV Source with High Intensity
  • Low Temperature 5 Axes Manipulator
  • Sample Strorage and Transfer Chamber
  • Pressure in Analysis Chamber <2 x 10-10 mbar
  • Sample Preparation Module
  • Designed and Tested in Berlin, Germany


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