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Lab HAXPES System with Cr-Monochromator and PHOIBOS Analyzer

SPECS High Energy XPS System (HAXPES) for Destruction Free Depth Profiling with PHOIBOS 150 HV Analyzer and Cr Monochromator.

The SPECS system for laboratory HAXPES is a fully equipped UHV analysis system for modern UHV high energy XPS. All systems are design and manufactured at the SPECS headquarter in Berlin. A special engineering group personally accompanies the system process from the order placing until the final acceptance. Our engineers are dedicated to highest quality and usability of the system during design, testing and setup on site. Once the system is in full operation a professional service team in our HQ and our worldwide branch offices takes care of a smooth and stable operation.

The SPECS Lab HAXPES system comes with the PHOIBOS 150 HV hemispherical energy analyzer for highest performance in the wide field from UPS to HAXPES up to 10000 eV. Using the FOCUS 730 a monochromated  X-ray source with Cr anode (5417 eV) is available. Optional additional sources with higher energies can be implemented on request. UV sources, charge compensation devices and other surface analyis techniques

The typical vacuum achieved in SPECS systems is better than 2 x 10-10 mbar achieved during assembly at SPECS. A final end pressure in the 10-11 mbar range is achievable. The standard pumping configuration consist of and ion getter pump (IGP), a titan sublimation pump (TSP) and a turbo molecular pump (TMP) with connecting to a roughing vacuum. Different pumping configurations are available on request including cryo pumps, larger pumping schemes and also NEG pumps.

All Systems are equipped with a rigid frame and included bake-out tents with automated heating systems. An electronics cabinet hosts all relevant electronics, a main power supply and a TCP/IP based communication platform for the control units.

All SPECS systems are ready for interconnections to other SPECS modules. Also the connection to existing systems can be tested on request.


  • PHOIBOS HV Analyzer
  • Up to 10000 eV Kinetic Energy
  • HAXPES Energy Resolution < 10 meV
  • Monochromated Cr Monochromator
  • Excitation with 5417 eV
  • 4 Axes Manipulator with Cooling and Herating
  • Pressure in Analysis Chamber <2 x 10-10 mbar
  • Optional Sample Preparation Module
  • Open and Modular System Design
  • Designed and Tested in Berlin, Germany


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