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Lab HAXPES System with Cr-Monochromator and PHOIBOS Analyzer

SPECS High Energy XPS System (HAXPES) for Destruction Free Depth Profiling with PHOIBOS 150 HV Analyzer and Cr Monochromator.

The SPECS system for laboratory HAXPES is a fully equipped UHV analysis system for modern UHV high energy XPS. All systems are design and manufactured at the SPECS headquarter in Berlin. A special engineering group personally accompanies the system process from the order placing until the final acceptance. Our engineers are dedicated to highest quality and usability of the system during design, testing and setup on site. Once the system is in full operation a professional service team in our HQ and our worldwide branch offices takes care of a smooth and stable operation.

The SPECS Lab HAXPES system comes with the PHOIBOS 150 HV hemispherical energy analyzer for highest performance in the wide field from UPS to HAXPES up to 10000 eV. Using the FOCUS 730 a monochromated  X-ray source with Cr anode (5417 eV) is available. Optional additional sources with higher energies can be implemented on request. UV sources, charge compensation devices and other surface analyis techniques

The typical vacuum achieved in SPECS systems is better than 2 x 10-10 mbar achieved during assembly at SPECS. A final end pressure in the 10-11 mbar range is achievable. The standard pumping configuration consist of and ion getter pump (IGP), a titan sublimation pump (TSP) and a turbo molecular pump (TMP) with connecting to a roughing vacuum. Different pumping configurations are available on request including cryo pumps, larger pumping schemes and also NEG pumps.

All Systems are equipped with a rigid frame and included bake-out tents with automated heating systems. An electronics cabinet hosts all relevant electronics, a main power supply and a TCP/IP based communication platform for the control units.

All SPECS systems are ready for interconnections to other SPECS modules. Also the connection to existing systems can be tested on request.


  • PHOIBOS HV Analyzer
  • Up to 10000 eV Kinetic Energy
  • HAXPES Energy Resolution < 10 meV
  • Monochromated Cr Monochromator
  • Excitation with 5417 eV
  • 4 Axes Manipulator with Cooling and Herating
  • Pressure in Analysis Chamber <2 x 10-10 mbar
  • Optional Sample Preparation Module
  • Open and Modular System Design
  • Designed and Tested in Berlin, Germany




  1. (2021) <p>Spectroscopic analysis with tender X-rays: SpAnTeX, a new AP-HAXPES end-station at BESSY II</p>

    We present a newly developed end-station at BESSY II dedicated to in situ Spectroscopic Analysis with Tender X-rays (SpAnTeX). The core of the end-station is a new SPECS PHOIBOS 150 HV NAP electron spectrometer. First, we show that the system has successfully achieved high electron transmission and detection efficiency under gas pressures up to 30 mbar and photon energies ranging between 200 eV and 10 keV. Second, using two features of this spectrometer (a new lateral resolution lens and a 3D delay line detector), we show that the endstation enables collection of the photoelectron spatial distribution under realistic working conditions (p ≥ 20 mbar) with a resolution better than 30 μm and the possibility to perform time resolved studies using a continuous tender X-ray source. We conclude by reporting an example of the possible experiments that can be performed using this new endstation using the Dip-and-Pull technique.

    Although mainly focused on the characterization of solid/liquid interfaces using AP-HAXPES, the end-station can be used at soft X-ray beamlines for more traditional AP-XPS experiments. The Dip-and-Pull module also demonstrates good electrochemical performance. The wide pressure and photon energy range covered by this end-station also enables investigations of solid/solid, solid/gas, liquid/vapor and liquid/liquid interfaces at pressures up to 30 mbar with tender X-rays.

    M. Favaro, P. C. J. Clark, M. J. Sear, M. Johansson, S. Maehl, R. van de Krol, and D.E. Starr
    Surface Science
    Volume 713, November 2021, 121903
    Read more
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