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IQE 12/38 Wien Filter

The Wien mass filter selects ions with a defined mass and allows for the generation of an isotope-pure ion beam without multiply charged ions and neutrals by using a combination of electric and magnetic fields.

The Wien Mass Filter is arranged between the ionizer volume and the focussing stages of the ion source IQE 12/38. It selects defined ions and suppresses impurities and neutrals by a combination of electric and magnetic fields. It has the ability to eliminate ions of unwanted isotopes, impurity ions, charged clusters as well as neutral particles and clusters by inclination of the optical axis. The standard configuration isequiped with 4800 Gauss magnet and for H and He gas applications 1000 Gaus magnet can be supplied. It is suitable for applications in Ion Scattering Spectroscopy ISS, SIMS and SNMS analysis.

KEY FEATURES

  • High dispersion
  • Neutral stop
  • Optional magnet for full mass range down to 1amu
  • Stigmatic correction and beam adjustment
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MADE FOR THESE METHODS

1
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SPECIFICATIONS

IQE 12/38 Wien Filter
Operation
Ion Current

>0.8 μA (Argon) at 125 μm spot

Ion Energy

200 eV - 5 keV

Operating Gases

Various

Scannable

yes

Working Principle

Extractor type

Applications

  • Depth profiling
  • Sample cleaning
  • Implantation
  • ISS/LEIS
  • SIMS/SNMS

Required Accessories

Gas inlet

Optional Accessories

  • Wien mass filter
  • Piezo gas inlet system
  • Differential pumping system
  • Remote operation for depth profiling

Performance
Scan Range

10 x 10 mm2 at working distance of 23 mm.

Spot Size

125 μm at 23 mm working distance

Mounting
Insertion Depth

186 mm

Mounting Flange

DN38CF (2.75 ")

Power Supply

  • PU-IQE12/38
  • PS-WF

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