EQ 22/35 Electron Source
The EQ 22/35 is a small spot, scannable electron source designed for stable and reliable operation at high electron currents.
This source can be used for almost any application which requires an focused electron beam. Among the popular applications are Auger Electron Spectroscopy (AES), scanning imaging applications (SAM/SEM), electron energy loss spectroscopy (EELS), or electron pulse applications such as desorption (ESD) experiments. Due to the high transmission of its Einzel-lens, the EQ 22/35 is an electron source which gives high electron beam currents over a wide energy range.
Special features such as key stone correction for keeping the spot size and shape constant during scanning operation, integrated pulse mode, a wide scan area and the extremely high stability power supply make it an easy to use choice for almost any kind of vacuum experiment involving electron beams.
> 100 μA
20 eV - 5 keV
AES, SEM, SAM, REELS
±5 mm at 32 mm
50 μm at 5 kV
Replacement cathode for EQ22/35 and EQ51