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EQ 22/35 Electron Source

The EQ 22/35 is a small spot, scannable electron source designed for stable and reliable operation at high electron currents.

This source can be used for almost any application which requires an focused electron beam. Among the popular applications are Auger Electron Spectroscopy (AES), scanning imaging applications (SAM/SEM), electron energy loss spectroscopy (EELS), or electron pulse applications such as desorption (ESD) experiments. Due to the high transmission of its Einzel-lens, the EQ 22/35 is an electron source which gives high electron beam currents over a wide energy range.

Special features such as key stone correction for keeping the spot size and shape constant during scanning operation, integrated pulse mode, a wide scan area and the extremely high stability power supply make it an easy to use choice for almost any kind of vacuum experiment involving electron beams.

KEY FEATURES

  • Wide energy range
  • High electron current
  • Small spot size
  • Integrated beam deflection
  • Key stone correction
  • Optional pulse mode
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MADE FOR THESE METHODS

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SPECIFICATIONS

EQ 22/35 Electron Source
Operation
Electron Current

> 100 μA

Electron Energy

20 eV - 5 keV

Scannable

yes

Applications

AES, SEM, SAM, REELS

Optional Accessories

  • Microformed filament (LaB6)
  • Pulsed operation with beam chopper
  • Performance
    Scan Range

    ±5 mm at 32 mm

    Spot Size

    50 μm at 5 kV

    Mounting
    Mounting Flange

    DN35CF (2.75”)

    Insertion Depth

    154 mm

    Working Distance

    32 mm

    Power Supply

    PU-EQ 22

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    SPARE PARTS

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    Hair pin cathode for EQ 22 and EQ 51

    Replacement cathode for EQ22/35 and EQ51

    2010866090
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    DOWNLOADS

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