Differential Pumping for µ-Focus 500/600 NAP

Differential Pumping System for µ-Focus 500/600 NAP

Differential pumping is used to maintain a large pressure difference between the analysis chamber, which is under near ambient pressure, and the µ-Focus 500/600 NAP X-ray source monochromator. This technique enables high resolution XPS measurements under near ambient pressure. The system consists of DN25 KF connection, turbo pump and a oil free scroll pump.

KEY FEATURES

  • High resolution XPS under near ambient pressure
  • High pumping efficieny 
  • One turbopump 
  • Oil free scroll pump
  • DN25 KF connection
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MADE FOR THESE METHODS

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