Differential Pumping for µ-Focus 500/600 NAP
Differential Pumping System for µ-Focus 500/600 NAP
Differential pumping is used to maintain a large pressure difference between the analysis chamber, which is under near ambient pressure, and the µ-Focus 500/600 NAP X-ray source monochromator. This technique enables high resolution XPS measurements under near ambient pressure. The system consists of DN25 KF connection, turbo pump and a oil free scroll pump.