Power supply for the focussing and scanning ion source IQE 12/38, designed for automated operation and full integration into SpecsLab Prodigy
The COSCON SIS is a fully digital power supply for the scanning ion source IQE 12/38. It allows for fast and precise scanning of the ion beam with up to 5 keV and up to 10 mA. It is fully integrated into the SpecsLab Prodigy acqisiton and evaluation software and can furthermore be controlled by its own web interface from any mobile device. Due to its possibility of sample current read back, imaging and highly precise and reproducible spectroscopy and sputter depth profiling application is possible. Auxilliary input ports on the scanning module allows for application of external scan generators for customized scanning patterns.
0.5 - 5 keV
0.01 - 10 mA
|X and Y deflection voltage|
+ / - 650 V