Digital power supply for the focusing and scanning low energy ion source IQE 12 LE, designed for dual beam charge compensation, sputter cleaning, depth profiling and low energy ion scattering spectroscopy (LEISS).
The COSCON LSIS is one of three power supply variants for the IQE 12/38 series, which controls the scanning and focusing low energy ion source IQE 12 LE. The low energy ions are used for dual beam charge compensation for XPS measurements. Additionally, sputter cleaning, depth profiling and LEISS can be performed with the IQE 12 LE.
The COSCON LSIS allows to operate the IQE 12 LE in both low and high energy modes and enhances the range of operation of the IQE 12 LE. Imaging capabilities by reading back the sample current improve navigation on the sample surface and facilitate dual beam charge compensation during XPS measurements. Fast scanning speeds and small scanning increments result in a highly precise operation of the ion beam.
The power supply is fully integrated into SpecsLab prodigy or can be controlled by a web browser application from any mobile device.
- operable in low energy (0 - 0.5 keV) and high energy mode (0.5 - 5 keV)
- ion current up to 10 mA
- integrated scanning and deflecting unit
- suitable for mapping, depth profiling and dual beam charge compensation (low energy mode)
- fully controlled by SpecsLab Prodigy or web browser application
- interlock control options
0 - 0.5 keV (low energy mode)
0.01 - 10 mA
|X and Y deflection voltage|
+ / - 10 V (low energy mode)