FDG 15
Variable Focus Ion Source
The FDG 15 ion source is designed to sputter clean samples for surface analysis with spot size varying from 300 μm to 50 mm or varying working distance correspondingly. FDG ion sources are made of completely non-magnetic materials and are compatible with high-resolution electron spectroscopy. An ultra clean ion beam is ensured by an indirect filament, a direct gas inlet for minimizing dead volume and effective differential pumping.
The power supply can be fully remote controlled and an easy to use software is provided.
SPECIFICATIONS
| Ion Current | >15 µA (at 5 keV and 50 mm WD) >1 µA (at 50 eV) |
| Ion Energy | 10 eV -5 keV |
| Operating Gases | Argon and other noble gases, Hydrogen and Oxygen |
| Scannable | no |
| Working Principle | Extractor type with floating column |
| Applications |
|
| Required Accessories | Gas inlet |
| Optional Accessories | Differential pumping |
| Scan Range | - |
| Spot Size | <300 µm (at 5 keV and 50 mm WD) |
| Insertion Depth | 173 mm |
| Mounting Flange | DN 40 CF |