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MPS-ECR-AN
Operation
Working Principle

Microwave assisted plasma source
E-beam power

60 W max. at 2.45 GHz
Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)
Operating Modes

Atom mode
Operating Pressure

< 10-7 - 10-5 mbar

Optional Accessories

  • Integrated shutter
  • Non standard lengths
  • Various aperture types
  • Differential pumping
  • Faraday cup: Provides the possibility to monitor the beam current
  • Ion trap: Deflects residual ion current out of the beam<
    		•
    Mounting
    Mounting Flange

    NW40CF (2.75 ")
    Insertion Depth

    130 mm
    Performance
    Spot Size

    ~13 mm at source
    Product details
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