Energy Dispersion |
Hemisphere |
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Slits/Apertures |
8 Entrance, 3 Exit slits and Iris aperture |
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Magnetic Shielding |
Double µ-Metal Shielding |
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Lens Modes |
Angular Resolving and Transmission Lens Modes |
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Kinetic Energy Range |
0 - 7000 eV |
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Pass Energies |
0 - 550 eV continously adjustable |
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Detector |
1D-DLD Detector |
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Measurement Modes |
Snapshot mode, Sweeping mode, Fixed energy mode |
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Energy Window |
13% of Pass Energy |
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Electric Isolation |
up to 7 keV |
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Electronics |
HSA 7000 plus |
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Working Pressure |
up to 30 mbar (higher pressure values achievable with corresponding nozzle diameters and differential pumping packages) |
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Acceptance Angle |
±22° |
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Angular Resolution |
only with 2D detector |
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Energy Resolution |
< 30 meV |
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Lateral Resolution |
only with 2D detector |
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Smallest Acceptance Spot |
Without imaging lens module the smallest acceptance spot is defined by the excitation spot of X-ray source or nozzle diameter |
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Detector Channels |
Max. 960 energy channels (240 and 120 channels for binning 4 and 8, respectively) |
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XPS Count Rates UHV |
70 kcps (guaranteed), 150 kcps (achievable) * |
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XPS Count Rates 10 mbar |
7 kcps (guaranteed), 15 kcps (achievable) * |
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XPS Count Rates 25 mbar |
0.5 kcps (guaranteed), 1.5 kcps (achievable) * |
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* Ag 3d, FWHM < 0.85 eV, small spot monochromated X-ray source µ-FOCUS 600, Al Kα anode, 20 W, Spot size < 250 µm |
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Mounting Flange |
DN150 CF (8" OD) |
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Working Distance |
300 - 500 µm (for standard nozzle with 300 µm diameter) |
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