| Energy Dispersion |
Hemisphere |
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| Slits/Apertures |
8 Entrance, 3 Exit slits and Iris aperture |
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| Magnetic Shielding |
Double µ-Metal Shielding |
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| Lens Modes |
Angular Resolving, Transmission and Magnification (Lateral Resolved) Lens Modes |
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| Kinetic Energy Range |
0 - 3500 eV |
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| Pass Energies |
0 - 550 eV continously adjustable |
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| Detector |
1D-DLD |
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| Measurement Modes |
Snapshot mode, Sweeping mode, Fixed energy mode |
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| Energy Window |
13% of Pass Energy |
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| Electric Isolation |
up to 3.5 keV |
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| Electronics |
HSA 3500 plus HT102 |
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| Working Pressure |
up to 1 mbar (up to 10-4 mbar without nozzle) |
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| Mounting Flange |
DN150 CF (8" OD) |
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| Working Distance |
300 - 500 µm (for standard nozzle with 300 µm diameter) |
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| Acceptance Angle |
±15° |
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| Angular Resolution |
< 0.1° |
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| Energy Resolution |
< 2 meV |
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| Lateral Resolution |
< 100 µm |
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| Smallest Acceptance Spot |
100 µm |
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| XPS Count Rates UHV |
20 kcps* |
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| XPS Count Rates 1 mbar |
16 kcps* |
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| Detector Channels |
1900 x 1200 (with channel binning) |
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| . |
* Ag 3d, FWHM < 0.85 eV, non-monochromatic X-ray source XR 50, Mg Kα anode, 300 W, N2 gas atmosphere |
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