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PCS-ECR-IN
Operation
Working Principle

Microwave assisted plasma source
E-beam power

250 W max. at 2.45 GHz
Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)
Operating Modes

Ion mode
Operating Pressure

< 10-7 - 10-5 mbar

Optional Accessories
  • Integrated shutter
  • Various aperture types
  • Differential pumping
  • Ion trap: Deflects residual ion current out of the beam
  • Faraday cup: Provides the possibility to monitor the beam current
Performance
Spot Size

~25 mm at source
Mounting
Mounting Flange

NW63CF (4.5 ")
Insertion Depth

300 mm
Product details
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