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EQ 22/35 Electron Source
Operation
Electron Current

> 100 μA

Electron Energy

20 eV - 5 keV

Scannable

yes

Applications

AES, SEM, SAM, REELS

Optional Accessories

  • Microformed filament (LaB6)
  • Pulsed operation with beam chopper
  • Performance
    Scan Range

    ±5 mm at 32 mm

    Spot Size

    50 μm at 5 kV

    Mounting
    Mounting Flange

    DN35CF (2.75”)

    Insertion Depth

    166 mm

    Working Distance

    20 mm

    Power Supply

    PU-EQ 22

    Product details
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