ELENA: Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods
ELENA is a Horizon 2020 Marie Sklodowska-Curie Innovative Training Network. It pulls together diverse resources from commercial partners, research institutes and universities to study the fundamental processes underpinning two innovative, next generation nanoscopic fabrication techniques: Extreme Ultra Violet Lithography (EUVL) and Focused Electron Beam Induced Processing (FEBIP). The network seeks to train through research a new generation of Early Stage Researchers with a fundamental understanding of the physics and chemistry underpinning FEBIP and EUVL and in commercial and entrepreneurial skills necessary to bring such research from the laboratory to the commercial arena. The overall aim is to translate the knowledge gained in this collaborative project to technological advantage with the ultimate goal of making these methods commercially competitive within the nanotechnology industry.