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PLD System

SPECS Pulse Laser Deposition System Module for SPECS SH2/12 (½ Inch) Samples, including Laser System

The SPECS PLD system module is powerfull deposition system module. All systems are designed and manufactured at the SPECS headquarter in Berlin. A special engineering group personally accompanies the system process from the order placing until the final acceptance. Our engineers are dedicated to highest quality and usability of the system during design, testing and setup on site. Once the system is in full operation, a professional service team in our HQ and our worldwide branch offices takes care of a smooth and stable operation.

This prepration module is a fully integrated prepration module for sample preparation with pulsed laser deospition. It includes the laser system (also optional), the laser target manipulator (6x1" target) the sample manipulator and the optical train assembly. A special loadlock for the PLD targets is ioncluded. The PLD chamber also consists of ports for a RHEED System, additional evaporators a gas inlet system with mass flow controllers.

A laser system  can be obtained via SPECS (Coherent Eximer Laser with 248 nm) or existing laser systems 

The typical vacuum in SPECS PLD systems is better than 2 x 10-8 mbar achieved during assembly at SPECS. The operational pressure is up to 1 mbar. The standard pumping configuration consists of and turbo molecular pump (TMP) with connecting to a roughing vacuum. Different pumping configurations are available on request including cryopumps, larger pumping schemes and also NEG pumps.

All systems are equipped with a rigid frame and included bake-out tents with automated heating systems. An electronics cabinet hosts all relevant electronics, a main power supply and a TCP/IP based communication platform for the control units.

The system is fully capsuled for laser safety.


  • Fully Intergated SPECS PLD System
  • 248 nm Excimer Laser
  • 6 x 1" Deposition Targets
  • Additional Evaporator Ports
  • Gas Inlet System with mass Flow Controllers
  • Port for NAP RHEED
  • Pressure Range <2 x 10-8 to 1 mbar


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