Power Supply for PCS-RF Radio Frequency Plasma Sources. 300 W and 600 W Versions with Control Unit for Impedance Matching Autotuning
The PCS-RF PS is a high voltage power supply used generate plasma in the PCS-RF radio frequency plasma sources. It comes in 300 W or 600 W versions, including impedance matching unit and the control unit to autotune the impedance matching. It provides all necessary voltages for an atom source.
For the operation of ion and hybrid sources the PCS-RF power supply is additionally required, where grid voltages can be applied. It supplies high voltages to the anode and extractor and allows to read the ion currents from these electrodes.
Optionally, PCS-IT control unit for atom sources can be supplied in order to deflect the ions.The optional ion trap consists of two electrodes on the front of the source. With a high voltage applied, positive and negative ions are attracted to the plates and thereby removed from the atom beam.