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MBE System

SPECS MBE System for Sample Prepration on SPECS SH2/12 (½ Inch) Samples.

The SPECS MBE system module a fully equipped UHV analysis system for advanced sample preparation. All systems are designed and manufactured at the SPECS headquarter in Berlin. A special engineering group personally accompanies the system process from the order placing until the final acceptance. Our engineers are dedicated to highest quality and usability of the system during design, testing and setup on site. Once the system is in full operation, a professional service team in our HQ and our worldwide branch offices takes care of a smooth and stable operation.

This sample prepration module is equipped with a 4 axes manipulator for half inch samples. The samples can be heated up to 800 °C and cooled down to liquid nitrogen temperature. The system module has flanges for a RHEED system, flanges for various evaporators, thickness monitor and sample transfer. the MBE system can be realized in the classical sample down geometry or in a customized confiduration, depending on the system design requirements. Via SpecsLab Prodigy the sampe preparation can be fully automated and comouter controlled. The SPECS EBE evaporator series allows sophisticated multi material evaporation.

The typical vacuum in SPECS systems is better than 2 x 10-10 mbar achieved during assembly at SPECS. A final end pressure in the 10-11 mbar range is achievable. The standard pumping configuration consists of and ion getter pump (IGP), a titan sublimation pump (TSP) and a turbo molecular pump (TMP) with connecting to a roughing vacuum. Different pumping configurations are available on request including cryopumps, larger pumping schemes and also NEG pumps.

All systems are equipped with a rigid frame and included bake-out tents with automated heating systems. An electronics cabinet hosts all relevant electronics, a main power supply and a TCP/IP based communication platform for the control units.


  • MBE System for SPECS SH2/12 Samples
  • 4 Axes Manipulator with Heating and Cooling
  • Automation of Sample Preparation via SpecsLab Prodigy
  • Customizavble Evaporator Configuration
  • Options for RHEED and LEED
  • Base Pressure better than 2 x 10-10 mbar and lower


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