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ISC 6000

Power Supply for SPECS IQP 10/63 Ion Source

The ISC 6000 supplies all voltages and currents needed for the SPECS IQP 10/63 source operation. The switch mode power supply operates in constant voltage or constant discharge current mode. The discharge voltage may be selected between 0 and 1 kV with a continuously variable discharge current (0 - 20 mA). The ion energy is continuously adjustable between 0 - 6 keV. The unit includes such features as potentiometer control, digital panel display and failure indicator.

KEY FEATURES

  •  Power supply voltage 0 - 6 kV
  • Discharge power supply up to 20 mA/1000V
  • Constant voltage/ current mode 
  • Standard setting 1 kV / 4.5 mA in constant current mode 
  • Connector cables to IQP 10/63 included, 5 m length 
  • 19” (W) x 132 mm (H), 12 kg 
  • 115/230 VAC switchable, 50-60 Hz

MADE FOR THESE METHODS

1
Sputter Depth Profiling
Film Thicknesses of multilayer samples and the depth distribution of elements can be characterized by sputter depth profiling.
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