Penning Discharge Type Cold Cathode Ion Source
The IQP 10/63 is a reliable ion source with high ion current up to 50 µA, variable ion energy 0 - 6 keV, flat beam profile and large sputter area. It is suitable for reactive gases and can be supplied with a complete gas inlet system.
Set of cathodes for IQP 10/63
Replacement ceramic for IQP 10/63