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IQP 10/63

Penning Discharge Type Cold Cathode Ion Source 

The IQP 10/63 is a reliable ion source with high ion current up to 50 µA, variable ion energy 0 - 6 keV, flat beam profile and large sputter area. It is suitable for reactive gases and can be supplied with a complete gas inlet system.

KEY FEATURES

  • Penning type cold cathode
  • High ion current
  • Flat beam profile
  • Large sputter area
  • Suitable for reactive gases


     
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MADE FOR THESE METHODS

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Sputter Depth Profiling
Film Thicknesses of multilayer samples and the depth distribution of elements can be characterized by sputter depth profiling.
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SPARE PARTS

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Product description
Article No.
 
Set of cathodes for IQP 10/63

Set of cathodes for IQP 10/63

2010867027
Support ceramic for IQP 10/63

Replacement ceramic for IQP 10/63

2003560126
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