Exractor type ion source optimized for sample cleaning.
The long lived Yttrium coated iridium filament makes the source suitable for inert and reactive gases. In order to minimise the pressure increase, the gas is fed directly into the ionization chamber through a separate DN16CF flange. Typically, the pressure in the UHV chamber remains in the 10-5 to 10-6 mbar range during operation.
The IQE 11/35 generates an ion current of 10-15 µA (Argon) with a Gaussian beam profile. The beam diameter and current density depend on the source-to-sample distance, which can be optimized by choosing one of the standard insertion length (62.5 mm, 120 mm, 190 mm, 250 mm) or a customized length.
The source is bakeable up to 250° C and can be cleaned by internal "degassing".
For operation of the source, two different power supplies are availble. The analog PU-IQE-3 kV allows easy manual control in the energy range beween 0.2 keV and 3 keV while the digital PU-IQE-5 kV also allows computer control in the higher energy range up to 5 kV.
- Suitable for reactive gases
- High ion beam current optimized for sample cleaning
- Compact and easy to handle
- Long term stable operation
- Excellent price/performance ratio
- Available with either analog or digital power supply
up to 20 μA (Argon)
200 eV - 5 keV
< 5 mm at 30 mm working distance
62.5 mm, 120 mm, 190 mm, 250 mm
DN35CF (2.75 ")
Anode cage for IQE 12/38, IQE 11/35, IQE 10/35
Cathode for IQE 12/38, IQE 11/35, IQE 10/35
Replacement ceramic for IQE11./35 Exchange together with 2027625206 recommended.
Replacement ceramic for IQE11/35. Exchange together with 2027625105 recommended.
Replacement membrane for VAT leak valve
Replacement Piezo actor for SPECS Piezo Gas Inlet system
New VAT leak valve
Bridge cable for PU IQE 12/38, PU IQE 11/35