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FlexProbe for state-of-the-art  μ-Probe XPS and HAXPES analysis

The latest addition to the SPECS system portfolio, the FlexProbe system, combines μ--probe XPS with HAXPES techniques in an innovative system solution. It is an illustration of our extensive experience in developing complex system solutions that fulfill the requirements for the most demanding scientific applications. One of the outstanding features of the system is that two small spot, monochromatic X-ray sources are mounted on the analysis chamber: the µ-FOCUS 195 with Al anode for µ-spot XPS analysis with 10µm lateral resolution as well as the µ-FOCUS 730 with Cr anode for HAXPES investigations. The fast and easy switch between AlKα (1.486 keV) and CrKα (5.414 keV) excitation energies allows the operator not only to characterize the sample surface, but also to gain insights into the bulk properties. The FlexProbe system is equipped with a SPECS PHOIBOS 150 hemispherical electron analyzer with 1D-DLD detector, which is the perfect match for ultra-fast XPS and HAXPES measurements. Different components like gas cluster ion source or an UV source can be added to the analysis chamber. An optional fully equipped preparation chamber allows for sample preparation by using sputtering, annealing or deposition techniques. The integration of these components in our versatile and easy-to-use SpecsLab Prodigy software package makes FlexProbe the perfect tool for your daily demanding XPS measurement tasks.


  • PHOIBOS 150 energy analyzer with delay line detector (DLD) for ultra-fast measurements
  • High-performance monochromatic Al Kα source for μ-Probe XPS
  • High-performance monochromatic Cr Kα X-ray source for HAXPES
  • 4-axes sample manipulator with e-beam heating and LN2 cooling
  • Optional UV source UVS 10/35 for UPS measurements
  • Optional dedicated sample preparation chamber
  • SpecsLab Prodigy software suite
  • Vacuum control software for system operation


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