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EBE-M

Highly Reliable Power Supply for EBE-4 Multi-Pocket E-Beam Evaporator

The SPECS EBE-M is a highly reliable analogue power supply for EBE-4 multi-pocket e-beam evaporator. The power supply is designed to operate up to four pockets in either sequential evaporation or simultaneous co-evaporation and to control emission current, filament current or flux for each pocket individually. With the specially shaped motorized shutter that provides various combinations of open and closed pockets, true coevaporation of different materials as well as programmed deposition of multilayer structures is possible. The parameters can be accessed via the intelligent front plate of the instrument or by remote control via ethernet. Each source can be operated in a range of zero to 300 Watts with the power required depending upon the material. The power supply includes independent filament supplies for each pocket (4 in total) and a common HV supply. The electronics allows all four pockets to operate simlutanously in co-evaporation mode and in conjunction with the appropriate monitoring, where the maximumtotal  power for all 4 pockets is 400W..

KEY FEATURES

  • Independent filament supplies for each pocket (4 in total)
  • Maximum pocket power 300W
  • Enables true co-evaporation
  • Remote contol
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MADE FOR THESE METHODS

1
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SPECIFICATIONS

EBE-M
Operation
Number of Pockets

1

Water Cooling

internal

Max. Power

400 W

Operating Pressure

< 10-10 - 10-5 mbar

Optional Accessories

  • „„Non standard lengths 150 - 500 mm„„
  • Electric motorization of manual shutter„„
  • 0.25 cc crucibles from C, Mo, Ta and W„„
  • Flux measurement electrode and feedthrough „„
  • Thermocouple (Type C) and feedthrough
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Mounting
Mounting Flange

NW35CF (2.75 ")

Insertion Depth

200 mm

Max. Rod Diameter

6 mm

Max. Rod Feed

50 mm

Max. Crucible Size

0.25 cc

Power Supply

400 W

Shutter

optional

Flux Monitor

optional

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