Differential Pumping for UVS 10/35

Differential Pumping System for SPECS UVS 10/35 UV Light Source

Efficient pumping system for the SPECS UVS 10/35 operation in low 10-6 to 10-8 mbar region. A turbo molecular pump with 67 l/s is attached to the UV souorce and connected to a rough pump system.

KEY FEATURES

  • Efficient Pumping System
  • One Turbo Molecular Pump
  • One Rough Vacuum Pump
  • Including all Necessary Vacuum Parts

MADE FOR THESE METHODS

1