Differential Pumping for IQE 12/38

Differential Pumping System for IQE 12/38 Ion Source for Ultra Clean Applications

Differential pumping is used to maintain a large pressure difference between the UHV chamber and the IQE 12/38 ion  source. This technique enables to maintain ultra low pressure in the chamber even during the sample preparation. The differential pumping unit consists of VAT angle valves (all metal), tubings and fittings connected to a  pumping stage (turbo pump, membran pump and controller). 

KEY FEATURES

  • Ultra low pressure during during sample preparation
  • High pumping efficiency
  • Pumping stage: turbo pump, membran pump and controller
  • VAT angle valves (all metal)
  • Tubings and fittings included

MADE FOR THESE METHODS

3