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EFM 4s

The EFM 4s

MADE FOR THESE METHODS

1
Deposition
Thin film deposition techniques allow for controlled growths of thin films either from an atomic/molecular flow or from chemically reactive precursors

SPECIFICATIONS

EFM 4s
Operation
Number of Pockets

1

Water Cooling

internal

E-beam power

300 W

Operating Pressure

< 10-10 - 10-5 mbar

Optional Accessories

Non standard lengths 

Mounting
Mounting Flange

NW35CF (2.75 ")

Insertion Depth

210 mm

Max. Rod Feed

25 mm

Power Supply

300 W

Shutter

Motorized shutter

DOWNLOADS

2
Focus EFM Series
download PDF
EFM Brochure
Brochures
download PDF
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