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The SPECS TGC-H is a fully UHV compatible thermal gas cracker source using electron bombardment heating of a tungsten capillary to thermally dissociate the gas passing through it. The small size and thermal mass of the capillary means that very little power is required with negligible heat load into the system. The filament itself is easy to replace. Moreover, no differential pumping is needed for operation in UHV and due to the electrically grounded capillary zero ion emission is achieved.

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