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The SPECS RHEED system can be used in a variety of applications such as molecular beam epitaxy, thin film deposition, chemical vapor deposition,

sputter deposition, and other coating and deposition techniques. Especially for elevated pressure thin film deposition techniques, like Pulsed Laser Deposition, or Atomic Layer Deposition a dedicated option with a differential pumping system expands the working pressure range for RHEED measurements up to 1 mbar.


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