DetailEBE-1
Single-Pocket Electron Beam Evaporator for Deposition of Thin Metal Films with Highest Purity for Various Surface Science Applications.
The EBE-1 is a combined mini e-beam evaporator and e-beam heated effusion cell. It is capable of evaporating small quantities of almost any material, either in rod form, or in a crucible.
The evaporant is heated by electron bombardment from the surrounding filament, which provides very even heat distribution. The extremely high power densities and local heating allows temperatures in excess of 3000 K to be reached.A long filament provides more surface area for electron emission with a consequent improvement in filament lifetime and if necessary, the filament can be easily replaced by simply using standard tungsten wire, without disassembling the evaporator head, to minimize downtime and maintenance cost. The robustness of the evaporator is further improved by the unique design of the high voltage feedthroughs on an 50 mm linear motion thimble without flexing leads in vacuum, which avoids fatigue and shorting problems.
The motorized shutter and the built in flux electrode make the evaporator suitable for precisely controlled growth of very thin films. This is supported by the power supply with intelligent front plate for control of filament current or flux. On the other hand, the robust power supply can generate up to 400W in order to evaporate the thickest rods (6 mm).
SPECIFICATIONS
| Number of Pockets | 1 |
| Water Cooling | internal |
| E-beam power | 400 W |
| Operating Pressure | < 10-10 - 10-5 mbar |
| Optional Accessories | Non standard lengths 0.25 cc crucibles from C, Mo, Ta and W Ion Trap option |
| Mounting Flange | NW35CF (2.75 ") |
| Insertion Depth | 217 mm |
| Max. Rod Diameter | 6 mm |
| Max. Rod Feed | 50 mm |
| Max. Crucible Size | 0.25 cc |
| Power Supply | 400 W |
| Shutter | Motorized shutter |
SPARE PARTS
Crucible EBE-1-C-C for electron beam evaporator EBE-1. Material: pyrolytic graphite. Volume: 0.25 cc
Crucible EBE-1-C-Mo for electron beam evaporator EBE-1. Material: Molybdenum. Volume: 0,25 cc
Crucible EBE-1-C-Ta for electron beam evaporator EBE-1. Material: Tantalum. Volume: 0,25 cc
Crucible EBE-1-C-VC for electron beam evaporator EBE-1. Material: Vitreous Carbon. Volume: 0,25 cc
Crucible EBE-1-C-W for electron beam evaporator EBE-1. Material: Tungsten. Volume: 0,25 cc
Crucible Insert EBE-1-CI-Al2O3 Aluminum oxide for electron beam evaporator EBE-1
Crucible Insert EBE-1-CI-BN Bornitrid for electron beam evaporator EBE-1
Crucible with end cap EBE-1-EC-C pyrolytic Carbon for electron beam evaporator EBE-1
Crucible with end cap EBE-1-EC-W Tungsten for electron beam evaporator EBE-1
Crucible Insert with end cap EBE-1-ECI-BN Bornitrid for electron beam evaporator EBE-1.
Crucible EBE-1-C-Mo with lid for electron beam evaporator EBE-1. Material: Molybdenum
Crucible EBE-1-C-Ta with lid for electron beam evaporator EBE-1. Material: Tantalum
Crucible EBE-1-C-VC with lid for electron beam evaporator EBE-1. Material: Vitreous Carbon
Crucible EBE-1-C-W with lid for electron beam evaporator EBE-1. Material: Tungsten
Rodholder EBE-1-RH6 for 6 mm rods including screws
Replacement filament for EBE-1
Rodholder EBE-1-RH2 for electron beam evaporator EBE-1 for 2 mm rods including screws
Rodholder EBE-1-RH3 for electron beam evaporator EBE-1 for 3 mm rods including screws
Rodholder EBE-1-RH4 for electron beam evaporator EBE-1 for 4 mm rods including screws
Rodholder EBE-1-RH5 for electron beam evaporator EBE-1 for 5 mm rods including screws
