EBE-1

Single-Pocket Electron Beam Evaporator for Deposition of Thin Metal Films with Highest Purity for Various Surface Science Applications.

The EBE-1 is a combined mini e-beam evaporator and e-beam heated effusion cell. It is capable of evaporating small quantities of almost any material, either in rod form, or in a crucible.
The evaporant is heated by electron bombardment from the surrounding filament, which provides very even heat distribution. The extremely high power densities and local heating allows temperatures in excess of 3000 K to be reached.A long filament provides more surface area for electron emission with a consequent improvement in filament lifetime and if necessary, the filament can be easily replaced by simply using standard tungsten wire, without disassembling the evaporator head, to minimize downtime and maintenance cost. The robustness of the evaporator is further improved by the unique design of the high voltage feedthroughs on an 50 mm linear motion thimble without flexing leads in vacuum, which avoids fatigue and shorting problems.
The motorized shutter and the built in flux electrode make the evaporator suitable for precisely controlled growth of very thin films.  This is supported by the power supply with intelligent front plate for control of filament current or flux. On the other hand, the robust power supply can generate up to 400W in order to evaporate the thickest rods (6 mm).
   

KEY FEATURES

  • Suitable for various materials
  • Unique high reliability design
  • Extremely high power densities
  • Temperatures in excess of 3000 K
  • Evaporation from rods and crucibles
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MADE FOR THESE METHODS

1
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SPECIFICATIONS

EBE-1
Operation
Number of Pockets

1

Water Cooling

internal

Max. Power

400 W

Operating Pressure

< 10-10 - 10-5 mbar

Optional Accessories
  • „„Non standard lengths 150 - 500 mm„„
  • Electric motorization of manual shutter„„
  • 0.25 cc crucibles from C, Mo, Ta and W„„
  • Flux measurement electrode and feedthrough „„
  • Thermocouple (Type C) and feedthrough
Mounting
Mounting Flange

NW35CF (2.75 ")

Insertion Depth

200 mm

Max. Rod Diameter

6 mm

Max. Rod Feed

50 mm

Max. Crucible Size

0.25 cc

Power Supply

400 W

Shutter

optional

Flux Monitor

optional

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SPARE PARTS

20
Product image
Product description
Article No.
 
Crucible EBE-1-C-C

Crucible EBE-1-C-C for electron beam evaporator EBE-1. Material: pyrolytic graphite. Volume: 0.25 cc

2055003898
Crucible EBE-1-C-Mo

Crucible EBE-1-C-Mo for electron beam evaporator EBE-1. Material: Molybdenum. Volume: 0,25 cc

2055003902
Crucible EBE-1-C-Ta

Crucible EBE-1-C-Ta for electron beam evaporator EBE-1. Material: Tantalum. Volume: 0,25 cc

2055003904
Crucible EBE-1-C-VCvitreous carbon

Crucible EBE-1-C-VC for electron beam evaporator EBE-1. Material: Vitreous Carbon. Volume: 0,25 cc

2055003900
Crucible EBE-1-C-W

Crucible EBE-1-C-W for electron beam evaporator EBE-1. Material: Tungsten. Volume: 0,25 cc

2055003906
Crucible Insert EBE-1-CI-Al2O3

Crucible Insert EBE-1-CI-Al2O3 Aluminum oxide for electron beam evaporator EBE-1

2055016528
Crucible insert EBE-1-CI-BN

Crucible Insert EBE-1-CI-BN Bornitrid for electron beam evaporator EBE-1

2055004193
Crucible with end cap EBE-1-EC-C

Crucible with end cap EBE-1-EC-C pyrolytic Carbon for electron beam evaporator EBE-1

2055003909
Crucible with end cap EBE-1-EC-W

Crucible with end cap EBE-1-EC-W Tungsten for electron beam evaporator EBE-1

2055003916
Crucible with end cap EBE-1-ECI-BN

Crucible Insert with end cap EBE-1-ECI-BN Bornitrid for electron beam evaporator EBE-1.

2055004196
EBE-1 crucible with lid C-Mo

Crucible EBE-1-C-Mo with lid for electron beam evaporator EBE-1. Material: Molybdenum

2055003911
EBE-1 crucible with lid C-Ta

Crucible EBE-1-C-Ta with lid for electron beam evaporator EBE-1. Material: Tantalum

2055003913
EBE-1 crucible with lid C-VC vitreous carbon

Crucible EBE-1-C-VC with lid for electron beam evaporator EBE-1. Material: Vitreous Carbon

2055003910
EBE-1 crucible with lid C-W

Crucible EBE-1-C-W with lid for electron beam evaporator EBE-1. Material: Tungsten

2055003917
EBE-1 rod holder 6 mm

Rodholder EBE-1-RH6 for 6 mm rods including screws

2055003897
Filament for EBE-1

Replacement filament for EBE-1

2055002208
Rod holder EBE-1-RH2

Rodholder EBE-1-RH2 for electron beam evaporator EBE-1 for 2 mm rods including screws

2055003889
Rod holder EBE-1-RH3

Rodholder EBE-1-RH3 for electron beam evaporator EBE-1 for 3 mm rods including screws

2055003891
Rod holder EBE-1-RH4

Rodholder EBE-1-RH4 for electron beam evaporator EBE-1 for 4 mm rods including screws

2055003893
Rod holder EBE-1-RH5

Rodholder EBE-1-RH5 for electron beam evaporator EBE-1 for 5 mm rods including screws

2055003895