Deposition Sources

Electron beam (e-beam) evaporation is a physical vapor deposition technique used to create thin films of materials by heating them with a focused electron beam. This method allows for the deposition of high-purity films, including metals and semiconductors, in ultra-high vacuum conditions. It is widely applied in surface science, materials research, and nanotechnology for producing coatings, electronic components, and optical devices. The precise control over deposition rates and material purity makes it ideal for applications requiring high-quality thin films, such as in microelectronics and photonics.