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PCS-RF-HN
Operation
Working Principle

Radio Frequency assisted plasma source

E-beam power

500 W max. at 13.56 MHz

(400W for oxygen and hydrogen)

Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)

Operating Modes

Hybrid mode

Operating Pressure

< 10-7 - 10-5 mbar

Optional Accessories

Integrated shutter

Non standard lengths

Various aperture types

Differential pumping

Autotuning unit

Viewport

Plasma monitor

Plasma Control

Faraday Cup

Performance
Spot Size

~23 mm at source

Mounting
Mounting Flange

NW63CF (4.5 ")

Insertion Depth

309 mm

Product details
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